The 67th JSAP Spring Meeting 2020
Session ID : 12p-A305-12
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
Development of Via-Switch with Multi-Layered a-Si/SiN/a-Si Varistor
*Noriyuki Iguchi, Naoki Banno, Koichiro Okamoto, Hideaki Numata, Masanori Hashimoto, Tadahiko Sugibayashi, Toshitsugu Sakamoto, Munehiro Tada
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