The 67th JSAP Spring Meeting 2020
Session ID : 13a-B401-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
Impacts of gate electrode formation process on interface properties of Al2O3/GaN gate stack structure
*Yuto Ando, Tohru Nakamura, Manato Deki, Noriyuki Taoka, Hirotaka Watanabe, Atsushi Tanaka, Shugo Nitta, Yoshio Honda, Hisashi Yamada, Mitsuaki Shimizu, Hiroshi Amano
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