JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 67th JSAP Spring Meeting 2020
Session ID : 13p-PB1-17
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Reduction of dislocation density in AlGaN/GaN HEMT by SLS layer
*Shunsuke UrataHyeongsu KimTakashi Egawa
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Keywords: 13p-PB1-17, MOCVD, HEMT, SLS
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© 2020 The Japan Society of Applied Physics
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