JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 67th JSAP Spring Meeting 2020
Session ID : 15p-A201-1
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Characterization of lateral channeling from threshold voltages of SiC side-gate JFETs fabricated by ion implantation
*Qimin JinMasashi NakajimaMitsuaki KanekoTsunenobu Kimoto
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© 2020 The Japan Society of Applied Physics
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