The 67th JSAP Spring Meeting 2020
Session ID : 15p-A201-1
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Spring Meeting
Number :
67
Location :
[in Japanese]
Date :
March 12, 2020 - March 15, 2020
Characterization of lateral channeling from threshold voltages of SiC side-gate JFETs fabricated by ion implantation