The 67th JSAP Spring Meeting 2020
Session ID : 15p-A201-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
Theoretical study for the effect of wet oxidants on the oxidation reactions at 4H-SiC/SiO2 interface
*Tsunashi Shimizu, Toru Akiyama, Pradipto Abdul Muizz, Kohji Nakamura, Tomonori Ito, Hiroyuki Kageshima, Masashi Uematsu, Kenji Shiraishi
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