The 67th JSAP Spring Meeting 2020
Session ID : 15p-D305-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 67
Location : [in Japanese]
Date : March 12, 2020 - March 15, 2020
Deterioration in the piezoelectric property of ScAlN thin film by negative ion bombardment increased in low-pressure sputtering deposition
Details
Article 1st page
