The 81st JSAP Autumn Meeting 2020
Session ID : 8a-Z04-14
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 81
Location : [in Japanese]
Date : September 08, 2020 - September 11, 2020
External Parameters Dependence of Incident Radicals and Ions on the Substrate in RF Low-Pressure Tetramethylsilane Plasmas
*Shun Suzuki, Koichi Ishii, Akinori Oda, Yoshiaki Watanabe, Takayuki Ohta, Hiroyuki Kousaka
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