The 81st JSAP Autumn Meeting 2020
Session ID : 8p-Z21-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 81
Location : [in Japanese]
Date : September 08, 2020 - September 11, 2020
Ionic composition analysis of high-power pulsed magnetron sputtering using a reflectron-type time-of-flight mass spectrometer
Yuki Nakagomi, Hiroshi Nishida, Nobuo Nishimiya, *Masaomi Sanekata, Hiroaki Yamamoto, Naoyuki Hirata, Masahide Tona, Keizo Tsukamoto, Kiyokazu Fuke, Keijiro Ohshimo, Fuminori Misaizu
Author information
Keywords:
8p-Z21-2,
sputtering,
High-power pulsed magnetron sputtering,
Time-of-flight mass spectrometry
Details
Article 1st page
