The 81st JSAP Autumn Meeting 2020
Session ID : 9p-Z02-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 81
Location : [in Japanese]
Date : September 08, 2020 - September 11, 2020
Preparation of High-quality AlN Templates and Its Application for Deep Ultraviolet Devices
*Hideto Miyake, Kanako Shojiki, Shiyu Xiao, Kenjiro Uesugi, Haruhiko Koizumi, Shigeyuki Kuboya
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