The 68th JSAP Spring Meeting 2021
Session ID : 18p-Z17-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Wireless communication of in-situ measurement data by color sensor in plasma reactor
*Keiji Sakurai, Takayuki Kitagawa, Shigeyuki Miyagi, Kazuyuki Noborio, Koushi Taguchi, Osamu Sakai
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