The 68th JSAP Spring Meeting 2021
Session ID : 18a-Z17-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Influence of gas pressure for oriented AlN film growth by magnetic mirror-type magnetron cathode
Details
Article 1st page
