The 68th JSAP Spring Meeting 2021
Session ID : 19a-Z17-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Formation of high-aspect-ratio Si nanocone using intermediate pressure hydrogen plasma
*Toshimitsu Nomura, Kenta Kimoto, Hiroaki Kakiuchi, Kiyoshi Yasutake, Hiromasa Ohmi
Author information
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