The 68th JSAP Spring Meeting 2021
Session ID : 19a-Z17-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Mechanical Characteristics of millefeuille type a-C:H films incorporating Carbon Nanoparticle Layer
*Kazunori Koga, SungHwa Hwang, Yuan Hao, Kunihiro Kamataki, Takamasa Okumura, Naho Itagaki, Masaharu Shiratani
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