The 68th JSAP Spring Meeting 2021
Session ID : 18p-Z24-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Effects of sputter gas pressure on the formation of compressively strained SiGe thin film using sputter epitaxy method
*Kento Ikeno, Yosuke Aoyagi, Nobumitsu Hirose, Akifumi Kasamatsu, Toshiaki Matsui, Yoshiyuki Suda, Takahiro Tsukamoto
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