The 68th JSAP Spring Meeting 2021
Session ID : 19p-Z24-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Study of Piezo-resistive Accelerometer using Full Minimal Fab
Details
Article 1st page
