JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 68th JSAP Spring Meeting 2021
Session ID : 16p-Z27-6
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Discrete AlN mole fraction observed in AlGaN Layer with Dense Macrosteps (1)
*Akira HiranoYosuke NagasawaMasamichi IppommatsuHideki SakoAi HashimotoRyuichi SugieYoshio HondaHiroshi AmanoIsamu AkasakiKazunobu KojimaShigefusa Chichibu
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Keywords: 16p-Z27-6, AlGaN, DUV, LED
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© 2021 The Japan Society of Applied Physics
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