The 68th JSAP Spring Meeting 2021
Session ID : 19a-Z27-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Depth-resolved tomographic analysis on thick AlN films grown on NPSS using nanobeam X-ray diffraction
*Nozomi Yamamoto, Yusuke Hayashi, Takeaki Hamachi, Yuta Nakanishi, Tetsuya Tohei, Kazushi Sumitani, Yasuhiko Imai, Shigeru Kimura, Kanako Shojiki, Hideto Miyake, Akira Sakai
Author information
Details
Article 1st page
