JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 68th JSAP Spring Meeting 2021
Session ID : 19a-Z27-5
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Depth-resolved tomographic analysis on thick AlN films grown on NPSS using nanobeam X-ray diffraction
*Nozomi YamamotoYusuke HayashiTakeaki HamachiYuta NakanishiTetsuya ToheiKazushi SumitaniYasuhiko ImaiShigeru KimuraKanako ShojikiHideto MiyakeAkira Sakai
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Keywords: 19a-Z27-5, AlN, nanoXRD, NPSS
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© 2021 The Japan Society of Applied Physics
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