The 68th JSAP Spring Meeting 2021
Session ID : 19a-Z27-5
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Spring Meeting
Number :
68
Location :
[in Japanese]
Date :
March 16, 2021 - March 19, 2021
Depth-resolved tomographic analysis on thick AlN films grown on NPSS using nanobeam X-ray diffraction