JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 68th JSAP Spring Meeting 2021
Session ID : 19p-Z27-2
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Growth and evaluation of high-quality N-polar AlN on sapphire substrate
*Wataru MatsumuraRyota SakamotoTadatosi ItoTakahiro SaitoKazuya AtakaNarihito OkadaKazuyuki Tadatomo
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© 2021 The Japan Society of Applied Physics
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