The 68th JSAP Spring Meeting 2021
Session ID : 19p-Z27-14
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Reduction of parasitic reaction during the AlN growth by HT-MOVPE
*Kentaro Nagamatsu, Shota Tsuda, Reiya Aono, Manabu Miyagawa, Yuuya Ageta, Hideki Hirayama, Yuusuke Takashima, Yoshiki Naoi
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