The 68th JSAP Spring Meeting 2021
Session ID : 16p-P02-4
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Spring Meeting
Number :
68
Location :
[in Japanese]
Date :
March 16, 2021 - March 19, 2021
Suppression of the crack formation in strained SiGe by using Ge-on-Si instead of Ge substrates