JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 68th JSAP Spring Meeting 2021
Session ID : 16p-P02-4
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Suppression of the crack formation in strained SiGe by using Ge-on-Si instead of Ge substrates
*Youya WagatsumaMd. Mahfuz AlamKazuya OkadaMichihiro YamadaKohei HamayaKentarou Sawano
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Keywords: 16p-P02-4, SiGe, strain
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© 2021 The Japan Society of Applied Physics
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