The 68th JSAP Spring Meeting 2021
Session ID : 17p-Z33-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Triaxial Strain Evaluation for Mesa-structured Carbon-doped Silicon using X-ray Reciprocal Space Mapping
*Kazutoshi Yoshioka, Masato Koharada, Gai Ogasawara, Ichiro Hirosawa, Takeshi Watanabe, Ryo Yokogawa, Atsushi Ogura
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