The 68th JSAP Spring Meeting 2021
Session ID : 17p-Z33-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Research on in situ Sb doping of tensile-strained Si/SiGe/Si(110) heterostructures
*Mizuki Kikkawa, Daichi Namiuchi, Beichen Chen, Miki Horiuchi, Taisuke Fujisawa, Junji Yamanaka, Kosuke Hara, Kiyokazu Nakagawa, Keisuke Arimoto
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