The 68th JSAP Spring Meeting 2021
Session ID : 16a-Z29-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Modeling of low-temperature atomic layer deposition of aluminum nitride
*Kentaro Saito, Kazuki Yoshida, Masanori Miura, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose
Author information
Details
Article 1st page
