The 68th JSAP Spring Meeting 2021
Session ID : 16p-Z29-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Elemental Reactions of Nb2O5 RT-ALD Explained by Quartz Crystal Microbalance Measurements
*Kazuki Yoshida, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Fumihiko Hirose
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Article 1st page
