The 68th JSAP Spring Meeting 2021
Session ID : 18p-Z29-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Effects of surface damages on current-modulating resistivity measurement of Si wafers
*Kosuke Hara, Yuka Tsukakoshi, Keito Makise, Keisuke Arimoto, Yusuke Hoshi, Satoru Matsushima
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