JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 68th JSAP Spring Meeting 2021
Session ID : 16p-Z13-3
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Spring Meeting

Number : 68

Location : [in Japanese]

Date : March 16, 2021 - March 19, 2021

Effects of dopant to DIW in freeze cleaning method
*Minami Nakamura, Kensuke Demura, Satoshi Nakamura, Masaya Kamiya, Kei Hattori
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Keywords: 16p-Z13-3, freeze cleaning, photomask, removal of fine particles
CONFERENCE PROCEEDINGS FREE ACCESS

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