The 68th JSAP Spring Meeting 2021
Session ID : 17a-Z04-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Influence of Grain Size and Elemental Composition to Plasma Resistance in Reactive Ion Etching
Keywords:
17a-Z04-4,
Yttrium fluoride,
Atmospheric plasma spraying,
Collision assisted sintering process
Details
Article 1st page
