The 68th JSAP Spring Meeting 2021
Session ID : 17p-Z13-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Deposition and Evaluation of Ta2O5 Piezoelectric Thin Film on Pt Crystal Film
*Keisuke Matsuura, Masashi Suzuki, Shoji Kakio, Masanori Kodera, Hiroshi Funakubo
Author information
Details
Article 1st page
