The 68th JSAP Spring Meeting 2021
Session ID : 17p-Z13-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Liquid viscoelasticity evaluation by the reflectometry of shear mode acoustic waves from c-axis tilted ScAlN thin films
Keywords:
17p-Z13-6,
piezoelectric material
Details
Article 1st page
