The 68th JSAP Spring Meeting 2021
Session ID : 19p-Z07-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 68
Location : [in Japanese]
Date : March 16, 2021 - March 19, 2021
Formation of silicon ultra-shallow high-concentration doping layer by laser doping method using a coating film
*Takayuki Kurashige, Akira Mizutani, Daisuke Nakamura, Hiroshi Ikenoue, Keita Katayama
Author information
Keywords:
19p-Z07-2,
laser doping
Details
Article 1st page
