The 82nd JSAP Autumn Meeting 2021
Session ID : 11a-N401-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Fabrication of self-standing thin resin film with small through holes by low temperature nanoimprint process
Details
Article 1st page
