The 82nd JSAP Autumn Meeting 2021
Session ID : 10a-S301-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Electron temperature, density, and energy distribution function diagnostics of the argon low pressure argon plasma generated by an etching unit based on optical emission spectroscopic measurement
*Yuya Yamashita, Takuya Akiba, Toshihide Iwanaga, Shuichi Date, Yamaoka Hidehiko, Hiroshi Akatsuka
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