JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 82nd JSAP Autumn Meeting 2021
Session ID : 10p-S301-9
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Autumn Meeting

Number : 82

Location : [in Japanese]

Date : September 10, 2021 - September 23, 2021

Production of RF ring-shaped hollow magnetized plasma for cylindrical facing target sputtering
*Shoma Imoto, Yasunori Ohtsu
Author information
Keywords: 10p-S301-9, cylindrical facing target sputtering
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (248K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2021 The Japan Society of Applied Physics
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top