The 82nd JSAP Autumn Meeting 2021
Session ID : 22p-P01-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Development of Yttrium Oxide Deposition Process using Microwave Excited Atmospheric Pressure Plasma Jet
*BatOrgil Oogii Erdenezaya, Ryosuke Shimizu, Sai Ngaunn Hseng, Kenta Kametani, Takeshi Aizawa, Yusuke Nakano, Yasunori Tanaka, Tetsuya Taima, Tatsuo Ishijima
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