JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 82nd JSAP Autumn Meeting 2021
Session ID : 13p-N323-14
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Formation process of graphene in atmospheric pressure remote plasma-enhanced chemical vapor deposition
*Yusuke SakaiTakeda KeigoHiramatsu mineo
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Keywords: 13p-N323-14, graphene, CVD
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© 2021 The Japan Society of Applied Physics
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