The 82nd JSAP Autumn Meeting 2021
Session ID : 10p-S202-14
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
SiC CVD reactor cleaning using low concentration ClF3 gas
Takumi Mamyouda, *Yuika Takizawa, Hitoshi Habuka, Akio Ishiguro, Shigeaki Ishii, Yoshiaki Daigo, Hideki Ito, Ichiro Mizushima, Yoshinao Takahashi
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