JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 82nd JSAP Autumn Meeting 2021
Session ID : 23p-P12-2
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Effects of substrate surface polarity on surface morphology of (ZnO)x(InN)1-x films fabricated by magnetron sputtering
*Ryota NarishigeDaisuke YamashitaKunihiro KamatakiTakamasa OkumuraKazunori KogaMasaharu ShirataniNaho Itagaki
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Keywords: 23p-P12-2, ZION, ZnO, sputtering
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© 2021 The Japan Society of Applied Physics
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