The 82nd JSAP Autumn Meeting 2021
Session ID : 23p-P12-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 82
Location : [in Japanese]
Date : September 10, 2021 - September 23, 2021
Sputter deposition of high-mobility amorphous In2O3:Sn films above 350°C using nitrogen
*Yuta Mido, Daisuke Yamashita, Takamasa Okumura, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Naho Itagaki
Author information
Details
Article 1st page
