The 69th JSAP Spring Meeting 2022
Session ID : 25p-P01-18
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Non-destructive spectral analysis of AlxGa1-xN films by synchrotron soft X-ray photoelectron spectromicroscopy
*Shingo Takezawa, Obama Roki, Zhang Wenxiong, Hukidome Hirokazu, Watanabe Issei, Imura Masataka, Tsuda Shunsuke, Kotsugi Masato, Nagamura Naoka
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