The 69th JSAP Spring Meeting 2022
Session ID : 22p-E105-16
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Control of Ion Flux to the Substrate in Material Processing with a Vacuum-Arc Discharge Considering Discharge Current Limitation Mechanisms (II)
*Yuya Asamoto, Takayuki Matsuda, Takashi Hamano, Masao Noma, Shigehiko Hasegawa, Michiru Yamashita, Keiichiro Urabe, Koji Eriguchi
Author information
Keywords:
22p-E105-16,
vacuum arc discharge
Details
Article 1st page
