The 69th JSAP Spring Meeting 2022
Session ID : 25p-E104-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Macro Particle Adhesion as a Function of Distance from Cathode in TiN Film Formation by Vacuum Arc Deposition
*Yoshinori Saiki, Junpei Kito, Yuki Hashimoto, Takahiro Bando, Toru Harigai, Hirofumi Takikawa, Hiroki Gima, Hiroaki Sugita
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