JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 69th JSAP Spring Meeting 2022
Session ID : 23a-E103-9
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Optical Emission Spectroscopy of Deep Oscillation Magnetron Sputtering: Ion-Confinement Effect
*Eisuke YokoyamaYouhei OnoDaiki SakamotoShoudai TakayamaNobuo NishimiyaMasaomi SanekataMasahide TonaHiroaki YamamotoKeizou TsukamotoKiyokazu HukeKeijiro OhshimoFuminori Misaizu
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© 2022 The Japan Society of Applied Physics
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