The 69th JSAP Spring Meeting 2022
Session ID : 26a-E307-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Fabrication of Ferroelectric HfxZr1-xO2 Thin Film by FLA -Thickness Dependence-
*Yuto Ota, Kento Izumi, Hikaru Kawarazaki, Hideaki Tanimura, Shinichi Kato, Yasuo Nara
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