The 69th JSAP Spring Meeting 2022
Session ID : 23p-D214-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Development of a fabrication process for superconducting integration circuits based on nitride superconductors for qubit control
*Shigeyuki Miyajima, Taro Yamashita, Masamitsu Tanaka, Naoki Takeuchi, Hirotaka Terai
Author information
Details
Article 1st page
