The 69th JSAP Spring Meeting 2022
Session ID : 23p-E307-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Optimum design of channel material and surface orientation for extremely-thin-body nMOSFETs robust to surface roughness scattering
*Kei Sumita, Chia-Tsong Chen, Kasidit Toprasertpong, Mitsuru Takenaka, Shinichi Takagi
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