The 69th JSAP Spring Meeting 2022
Session ID : 24a-E302-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Formation of Stable GaN MOS Structures Based on Sputter Deposition of SiO2 Dielectrics
*Kentaro Onishi, Bunichiro Mikake, Kazuki Tomigahara, Hidetoshi Mizobata, Mikito Nozaki, Takuma Kobayashi, Takayoshi Shimura, HeHeiji Watanabe
Author information
Keywords:
24a-E302-6,
GaN
Details
Article 1st page
