The 69th JSAP Spring Meeting 2022
Session ID : 24p-E302-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Formation of high-quality SiC/SiO2 interfaces by suppressing SiC oxidation
*Takuma Kobayashi, Takafumi Okuda, Keita Tachiki, Koji Ito, Yu-ichiro Matsushita, Tsunenobu Kimoto
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