The 69th JSAP Spring Meeting 2022
Session ID : 24p-E302-13
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Mobility change of 4H-SiC(0001) Trench MOSFET by mechanical stress
*Naotoshi Hikosaka, Eiji Kagoshima, Shigehisa Shibayama, Mitsuo Sakashita, Hidemoto Tomita, Tsuyoshi Nishiwaki, Hirokazu Fujiwara, Osamu Nakatsuka, Wakana Takeuchi
Author information
Keywords:
24p-E302-13,
4H-SiC
Details
Article 1st page
