The 69th JSAP Spring Meeting 2022
Session ID : 25p-E301-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Research on imaging technique for transient thermal diffusion processes in silicon wafers by Optical-Interference Contactless Thermometry (OICT)
*Kotaro Matsuguchi, Keiya Fujimoto, Jiawen Yu, Hiroaki Hanafusa, Takuma Sato, Seiichiro Higashi
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