The 69th JSAP Spring Meeting 2022
Session ID : 25p-P11-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Electrical properties of normally-off type AlGaN/GaN MIS-HEMTs with SiO2/Al2O3 double insulators fabricated by ALD Ⅱ
Details
Article 1st page
